WebWith the new 300mm bare wafer ADR, a typical automated measurement run would go as follows. - A bare wafer is run by a laser-scattering defect inspection tool (e.g. Surfscan) - Then an operator registers the resulting defect coordinates file, known as KLARF for the Surfscan tool, to Park NX-Wafer. - The coordinates of the defect map are ... WebThe system can review defects on an imported KLARF file. What is the output of scan and analysis data? We can export to KLARF, csv, and xml formats. Custom Options. Do you customize software for individual customers or application? Yes. We will customize software to meet the needs of our customers and for other special applications.
Klarf View Users Guide - SlideShare
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