Web15 Jun 2024 · Our Sigma® fxP offers significant benefits with respect to cross-wafer thickness uniformity, film stress control and elimination of crystalline defects in the AlN … WebSPTS Rapier module is a unique, patented dual plasma source, that offers high flexibility with multiple operating modes. SPTS Rapier module is fitted with two RF independent sources (up to 3kW), and two independent gas showers (center and edge zones) for excellent uniformity at improved etch rates control. The module includes a high-efficiency ...
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Web4 Sep 2013 · SPTS Announce Sigma fxP PVD for 300mm Power Device Manufacturing September 04, 2013 Newport, United Kingdom, and SEMICON Taiwan, 4 Sept, 2013 – … WebSPTS Model : Versalis FxP APS module Purpose : Dry etch cluster tool CAPABILITY: Dielectric etch module Tailored chamber design to increase the process stability Plasma … flight from cincinnati to washington dc
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Web15 Sep 2024 · SPTS Technologies’ Sigma fxP PVD system chosen by Chipmore SPTS Technologies, an Orbotech company, has been selected by Chipmore Technology … Web21 May 2024 · SPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD, and MVD wafer processing solutions for the global … WebSPTS Trikon Sigma 200 fxp. Location: Europe. Condition: Lightly used, complete and working prior to de-installation. Process: Etch/PVD. Chambers: (Qty 3) Process Chambers. … flight from cle to can